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SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 7 April 2008)] Optical Micro- and Nanometrology in Microsystems Technology II - AlN driven microcantilever actuators: modeling, fabrication, characterization

SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 7 April 2008)] Optical Micro- and Nanometrology in Microsystems Technology II - AlN driven microcantilever actuators: modeling, fabrication, characterization

Krupa, K.; Gorecki, Christophe; Asundi, Anand K.; Józwik, M.; Andrei, A.; Osten, Wolfgang; Nieradko, Ł.; Gorecki, C.; Delobelle, P.; Hirsinger, L.
  • 作者Krupa, K.; Gorecki, Christophe; Asundi, Anand K.; Józwik, M.; Andrei, A.; Osten, Wolfgang; Nieradko, Ł.; Gorecki, C.; Delobelle, P.; Hirsinger, L.
  • 卷第6995卷
  • 印刷ISSN0277-786X
  • 文件大小1531.42KB
  • 发表时间2008
  • DOI10.1117/12.781262
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