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SPIE Proceedings [SPIE XVII International Symposium on Gas Flow and Chemical Lasers and High Power Lasers - Lisboa, Portugal (Monday 15 September 2008)] XVII International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers - A laser-plasma clean soft x-ray source for projection microlithography

SPIE Proceedings [SPIE XVII International Symposium on Gas Flow and Chemical Lasers and High Power Lasers - Lisboa, Portugal (Monday 15 September 2008)] XVII International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers - A laser-plasma clean soft x-ray source for projection microlithography

Bollanti, S.; Di Lazzaro, P.; Flora, F.; Mezi, L.; Murra, D.; Torre, A.
  • 作者Bollanti, S.; Di Lazzaro, P.; Flora, F.; Mezi, L.; Murra, D.; Torre, A.
  • 卷第7131卷
  • 印刷ISSN0277-786X
  • 文件大小1987.98KB
  • 发表时间2008
  • DOI10.1117/12.816912
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