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Effect of O2 partial pressure and substrate temperature on the plasma emission spectra and ZnO growth behavior

Effect of O2 partial pressure and substrate temperature on the plasma emission spectra and ZnO growth behavior

M. Liu; C. Y. Ma; Q. Y. Zhang

作者M. Liu; C. Y. Ma; Q. Y. Zhang
卷第205卷
期第4期
印刷ISSN1862-6319
文件大小318.95KB
发表时间2008
DOI10.1002/pssa.200778316
页码961-964

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