Simultaneous double side grinding of silicon wafers: a mathematical model for the wafer shape
- 期刊名称International Journal of Nanomanufacturing
- 作者Li, Z.C.; Pei, Z.J.; Fisher, Graham R.
- 卷第2卷
- 期第6期
- 印刷ISSN1746-9392
- 电子ISSN1746-9406
- 文件大小1271.37KB
- 发表时间2008
- DOI10.1504/ijnm.2008.023173
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