Characterization of Surface and Sub- Surface Defects on Devices using Complimentary Techniques
- 期刊名称Microscopy Today
- 作者Smentkowski, Vincent S.; Ostrowski, Sara G.; Denault, Lauraine; Woychik, Charles G.
- 卷第16卷
- 期第6期
- 印刷ISSN1551-9295
- 电子ISSN2150-3583
- 文件大小2471.00KB
- 发表时间2008-11
- DOI10.1017/S1551929500062325
- 页码18-20
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