Neutral Debris Mitigation in Laser Produced Extreme Ultraviolet Light Source by the Use of Minimum-Mass Tin Target

Shimomura, Masashi; Fujioka, Shinsuke; Ando, Tsuyoshi; Sakaguchi, Hirokazu; Nakai, Yuki; Yasuda, Yuzuri; Nishimura, Hiroaki; Nagai, Keiji; Norimatsu, Takayoshi; Nishihara, Katsunobu; Miyanaga, Noriaki; Izawa, Yasukazu; Mima, Kunioki

期刊名称Applied Physics Express
作者Shimomura, Masashi; Fujioka, Shinsuke; Ando, Tsuyoshi; Sakaguchi, Hirokazu; Nakai, Yuki; Yasuda, Yuzuri; Nishimura, Hiroaki; Nagai, Keiji; Norimatsu, Takayoshi; Nishihara, Katsunobu; Miyanaga, Noriaki; Izawa, Yasukazu; Mima, Kunioki
卷第1卷
印刷ISSN1882-0778
电子ISSN1882-0786
文件大小1395.35KB
发表时间2008-4-25
DOI10.1143/APEX.1.056001

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Neutral Debris Mitigation in Laser Produced Extreme Ultraviolet Light Source by the Use of Minimum-Mass Tin Target