Zinc oxide thin film-based MEMS acoustic sensor with tunnel for pressure compensation

• 作者Aarti Arora; Anil Arora; V.K. Dwivedi; P.J. George; K. Sreenivas; Vinay Gupta
• 卷第141卷
• 期第2期
• 印刷ISSN0924-4247
• 文件大小726.75KB
• 发表时间2008
• DOI10.1016/j.sna.2007.09.016
• 页码256-261