Formation of hydrogen donors in proton-implanted epitaxial silicon
- 作者Yu. M. Pokotilo; A. N. Petukh; V. V. Litvinov; V. G. Tsvyrko
- 卷第45卷
- 期第11期
- 印刷ISSN0020-1685
- 电子ISSN1608-3172
- 文件大小228.50KB
- 发表时间2009-11
- DOI10.1134/s0020168509110016
- 页码1205-1209
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