Capacitive Sensor Interface for an Electrostatically Levitated Micromotor
- 作者Fengtian Han; Qiuping Wu; Rong Zhang; Jingxin Dong
- 卷第58卷
- 期第10期
- 印刷ISSN0018-9456
- 电子ISSN1557-9662
- 文件大小1046.62KB
- 发表时间2009
- DOI10.1109/tim.2009.2018006
- 页码3519-3526
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