Silicon oxidation by ozone
- 期刊名称Journal of Physics: Condensed Matter
- 作者Fink, Christian K; Nakamura, Ken; Ichimura, Shingo; Jenkins, Stephen J
- 卷第21卷
- 期第18期
- 印刷ISSN0953-8984
- 电子ISSN1361-648X
- 文件大小1595.22KB
- 发表时间2009-05-06
- DOI10.1088/0953-8984/21/18/183001
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