[IEEE 2009 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Berlin, Germany (2009.05.10-2009.05.12)] 2009 IEEE/SEMI Advanced Semiconductor Manufacturing Conference - Predicting the mean cycle time as a function of throughput and product mix for cluster tool workstations using EPT-based aggregate modeling
- 作者Veeger, C.P.L.; Etman, L.F.P.; van Herk, J.; Rooda, J.E.
- 文件大小513.29KB
- 发表时间2009
- DOI10.1109/ASMC.2009.5155958
- 页码80-85
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