![[IEEE 1994 IEEE International Integrated Reliability Workshop (IRWS) - Lake Tahoe, CA, USA (16-19 Oct. 1994)] Proceedings of 1994 IEEE International Integrated Reliability Workshop (IRWS) - An electrical method for determining the thickness of metal films and the cross-sectional area of metal lines]()
[IEEE 1994 IEEE International Integrated Reliability Workshop (IRWS) - Lake Tahoe, CA, USA (16-19 Oct. 1994)] Proceedings of 1994 IEEE International Integrated Reliability Workshop (IRWS) - An electrical method for determining the thickness of metal films and the cross-sectional area of metal linesSchafft, H.A.; Mayo, S.; Jones, S.N.; Suehle, J.S. · 1994