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Influence of the sputtering pressure on the properties of transparent conducting zirconium-doped zinc oxide films prepared by RF magnetron sputtering

Influence of the sputtering pressure on the properties of transparent conducting zirconium-doped zinc oxide films prepared by RF magnetron sputtering

Hanfa, Liu; Huafu, Zhang; Chengxin, Lei; Changkun, Yuan
  • 期刊名称Journal of Semiconductors
  • 作者Hanfa, Liu; Huafu, Zhang; Chengxin, Lei; Changkun, Yuan
  • 卷第30卷
  • 期第2期
  • 印刷ISSN1674-4926
  • 文件大小162.14KB
  • 发表时间2009-02
  • DOI10.1088/1674-4926/30/2/023001
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