SIMULTANEOUS DOUBLE-SIDE GRINDING OF SILICON WAFERS: A REVIEW AND ANALYSIS OF EXPERIMENTAL INVESTIGATIONS
- 期刊名称Machining Science and Technology
- 作者Qin, Na; Pei, Z. J.; Fisher, Graham R.; Liu, J.
- 卷第13卷
- 期第3期
- 印刷ISSN1091-0344
- 电子ISSN1532-2483
- 文件大小1817.87KB
- 发表时间2009-08-31
- DOI10.1080/10910340903237673
- 页码285-316
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