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Effects of anisotropic elasticity on stress concentration in micro mechanical structures fabricated on (001) single-crystal silicon films

Effects of anisotropic elasticity on stress concentration in micro mechanical structures fabricated on (001) single-crystal silicon films

Ikehara, Tsuyoshi; Tsuchiya, Toshiyuki

期刊名称Journal of Applied Physics
作者Ikehara, Tsuyoshi; Tsuchiya, Toshiyuki
卷第105卷
期第9期
印刷ISSN0021-8979
文件大小1083.10KB
发表时间2009
DOI10.1063/1.3124368

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