Effect of magnetic field strength on deposition rate and energy flux in a dc magnetron sputtering system

Ekpe, Samuel D.; Jimenez, Francisco J.; Field, David J.; Davis, Martin J.; Dew, Steven K.

期刊名称Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
作者Ekpe, Samuel D.; Jimenez, Francisco J.; Field, David J.; Davis, Martin J.; Dew, Steven K.
卷第27卷
期第6期
印刷ISSN0734-2101
文件大小833.04KB
发表时间2009
DOI10.1116/1.3222874

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