[IEEE 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems. MEMS 2009 - Sorrento (2009.01.25-2009.01.29)] 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems - Sub-5μM Diameter Silicon Microprobe and Silicon Dioxide Microtube Arrays for Low-Invasive In-Vivo Animal Experiments
Takei, K.; Kawano, T.; Kawashima, T.; Sawada, K.; Kaneko, H.; Ishida, M.
- 作者Takei, K.; Kawano, T.; Kawashima, T.; Sawada, K.; Kaneko, H.; Ishida, M.
- 文件大小2393.67KB
- 发表时间2009
- DOI10.1109/memsys.2009.4805351
- 页码192-195