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Two-dimensional numerical simulation of radio frequency sputter amorphous In–Ga–Zn–O thin-film transistors

Two-dimensional numerical simulation of radio frequency sputter amorphous In–Ga–Zn–O thin-film transistors

Fung, Tze-Ching; Chuang, Chiao-Shun; Chen, Charlene; Abe, Katsumi; Cottle, Robert; Townsend, Mark; Kumomi, Hideya; Kanicki, Jerzy
  • 期刊名称Journal of Applied Physics
  • 作者Fung, Tze-Ching; Chuang, Chiao-Shun; Chen, Charlene; Abe, Katsumi; Cottle, Robert; Townsend, Mark; Kumomi, Hideya; Kanicki, Jerzy
  • 卷第106卷
  • 期第8期
  • 印刷ISSN0021-8979
  • 文件大小1583.12KB
  • 发表时间2009
  • DOI10.1063/1.3234400
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