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Systematic Investigation of
<i>c</i>
-Axis Tilt in GaN and AlGaN Grown on Vicinal SiC(0001) Substrates

Systematic Investigation of c -Axis Tilt in GaN and AlGaN Grown on Vicinal SiC(0001) Substrates

Suda, Jun; Miyake, Hiroki; Amari, Koichi; Nakano, Yuki; Kimoto, Tsunenobu

期刊名称Japanese Journal of Applied Physics
作者Suda, Jun; Miyake, Hiroki; Amari, Koichi; Nakano, Yuki; Kimoto, Tsunenobu
卷第48卷
期第2期
印刷ISSN0021-4922
电子ISSN1347-4065
文件大小104.55KB
发表时间2009-2-5
DOI10.1143/jjap.48.020202

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