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Impurity engineering of Czochralski silicon used for ultra large-scaled-integrated circuits

Impurity engineering of Czochralski silicon used for ultra large-scaled-integrated circuits

Deren Yang; Jiahe Chen; Xiangyang Ma; Duanlin Que

作者Deren Yang; Jiahe Chen; Xiangyang Ma; Duanlin Que
卷第311卷
期第3期
印刷ISSN0022-0248
文件大小696.57KB
发表时间2009
DOI10.1016/j.jcrysgro.2008.09.194
页码837-841

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