Local Corrosion of the Oxide Passivation Layer during Cu Chemical Mechanical Polishing
- 期刊名称Electrochemical and Solid-State Letters
- 作者Kang, Min Cheol; Kim, Yung Jun; Koo, Hyo-Chol; Cho, Sung Ki; Kim, Jae Jeong
- 卷第12卷
- 期第12期
- 印刷ISSN1099-0062
- 文件大小341.32KB
- 发表时间2009
- DOI10.1149/1.3236391
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