High Temperature Post-deposition Annealing Studies of Layer-by-layer (LBL) Deposited Hydrogenated Amorphous Silicon Films
- 期刊名称MRS Proceedings
- 作者Tong, Goh Boon; Gani, Siti Meriam Ab.; Muhamad, Muhamad Rasat; Rahman, Saadah Abdul
- 卷第1153卷
- 电子ISSN1946-4274
- 文件大小296.55KB
- 发表时间2009-1
- DOI10.1557/PROC-1153-A05-01
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