Challenges of 4H-SiC MOSFETs on the C(000-1) Face toward the Achievement of Ultra Low On-Resistance
- 期刊名称Materials Science Forum
- 作者Fukuda, Kenji; Harada, Shinsuke; Senzaki, Junji; Okamoto, Mitsuo; Tanaka, Yasunori; Kinoshita, Akimasa; Kosugi, Ryouji; Kojima, Kazu; Kato, Makoto; Shimozato, Atsushi; Suzuki, Kenji; Hayashi, Yusuke; Takao, Kazuto; Kato, Tomohisa; Nishizawa, Shinichi; Yatsuo, Tsutomu; Okumura, Hajime; Ohashi, Hiromichi; Arai, Kazuo
- 电子ISSN1662-9752
- 文件大小735.76KB
- 发表时间2009
- DOI10.4028/www.scientific.net/MSF.600-603.907
- 页码907-912
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