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Molecular Simulation on Interfacial Structure and Gettering Efficiency of Si (110)/(100) Directly Bonded Hybrid Crystal Orientation Substrates

Molecular Simulation on Interfacial Structure and Gettering Efficiency of Si (110)/(100) Directly Bonded Hybrid Crystal Orientation Substrates

Kariyazaki, Hiroaki; Aoki, Tatsuhiko; Izunome, Koji; Sueoka, Koji

期刊名称Solid State Phenomena
作者Kariyazaki, Hiroaki; Aoki, Tatsuhiko; Izunome, Koji; Sueoka, Koji
电子ISSN1662-9779
文件大小1134.92KB
发表时间2009-10
DOI10.4028/www.scientific.net/SSP.156-158.199
页码199-204

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