Sputtering yield measurements with size-selected gas cluster ion beams
- 期刊名称MRS Proceedings
- 作者Ichiki, Kazuya; Ninomiya, Satoshi; Seki, Toshio; Aoki, Takaaki; Matsuo, Jiro
- 卷第1181卷
- 电子ISSN1946-4274
- 文件大小142.24KB
- 发表时间2009-1
- DOI10.1557/PROC-1181-DD13-25
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