[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - High-k Dielectrics and Interface Passivation for Ge and III/V Devices on Silicon for Advanced CMOS

Heyns, Marc M.; Bellenger, Florence; Brammertz, Guy; Caymax, Matty; De Jaeger, Brice; Delabie, Annelies; Eneman, Geert; Houssa, Michel; Lin, Dennis; Martens, Koen; Merckling, Clement; Meuris, Marc; Mitard, Jerome; Penaud, Julien; Pourtois, Geoffrey; Scarrozza, Marco; Simoen, Eddy; Sioncke, Sonja; Van Elshocht, S.; Wang, Wei-E

作者Heyns, Marc M.; Bellenger, Florence; Brammertz, Guy; Caymax, Matty; De Jaeger, Brice; Delabie, Annelies; Eneman, Geert; Houssa, Michel; Lin, Dennis; Martens, Koen; Merckling, Clement; Meuris, Marc; Mitard, Jerome; Penaud, Julien; Pourtois, Geoffrey; Scarrozza, Marco; Simoen, Eddy; Sioncke, Sonja; Van Elshocht, S.; Wang, Wei-E
文件大小1566.51KB
发表时间2009
DOI10.1149/1.3206606
页码51-65

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[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - High-k Dielectrics and Interface Passivation for Ge and III/V Devices on Silicon for Advanced CMOS