Two-Branch Boron Diffusion from Gas Phase in n-Type 4H-SiC
Bolotnikov, A.V.; Muzykov, P.G.; Agarwal, Anant; Zhang, Qing Chun; Sudarshan, Tangali S.
- 期刊名称Materials Science Forum
- 作者Bolotnikov, A.V.; Muzykov, P.G.; Agarwal, Anant; Zhang, Qing Chun; Sudarshan, Tangali S.
- 电子ISSN1662-9752
- 文件大小502.27KB
- 发表时间2009
- DOI10.4028/www.scientific.net/MSF.615-617.453
- 页码453-456