Gettering Efficiency of Si (110)/(100) Directly Bonded Hybrid Crystal Orientation Substrates
- 期刊名称Solid State Phenomena
- 作者Aoki, Tatsuhiko; Kariyazaki, Hiroaki; Sueoka, Koji; Izunome, Koji
- 电子ISSN1662-9779
- 文件大小873.77KB
- 发表时间2009-10
- DOI10.4028/www.scientific.net/SSP.156-158.369
- 页码369-373
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