Investigation of Carbon Nanotube Growth on Multimetal Layers for Advanced Interconnect Applications in Microelectronic Devices
- 期刊名称Journal of The Electrochemical Society
- 作者Lin, Nay; Wang, Huili; Dixit, Pradeep; Xu, Ting; Zhang, Sam; Miao, Jianmin
- 卷第156卷
- 期第3期
- 印刷ISSN0013-4651
- 文件大小1049.16KB
- 发表时间2009
- DOI10.1149/1.3060347
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