Application of Supercritical CO[sub 2] Fluid for Dielectric Improvement of SiO[sub x] Film
- 期刊名称Electrochemical and Solid-State Letters
- 作者Tsai, Chih-Tsung; Chang, Ting-Chang; Liu, Po-Tsun; Cheng, Yi-Li; Kin, Kon-Tsu; Huang, Fon-Shan
- 卷第12卷
- 期第2期
- 印刷ISSN1099-0062
- 文件大小352.98KB
- 发表时间2009
- DOI10.1149/1.3028217
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