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Accumulated sidewall damage in dry etched photonic crystals

Accumulated sidewall damage in dry etched photonic crystals

A. Berrier; Y. Shi; J. Siegert; S. Marcinkevicius; S. He; S. Anand

作者A. Berrier; Y. Shi; J. Siegert; S. Marcinkevicius; S. He; S. Anand
文件大小936.71KB
发表时间2009
DOI10.1116/1.3179256

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