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Duplication of nanoimprint templates by a novel SU-8/SiO[sub 2]/PMMA trilayer technique

Duplication of nanoimprint templates by a novel SU-8/SiO[sub 2]/PMMA trilayer technique

J. Wan; Z. Shu; S. Deng; S. Xie; B. Lu; R. Liu; Y. Chen; X. Qu

作者J. Wan; Z. Shu; S. Deng; S. Xie; B. Lu; R. Liu; Y. Chen; X. Qu
文件大小720.47KB
发表时间2009
DOI10.1116/1.3039687

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