A Review of Feedforward Control Approaches in Nanopositioning for High-Speed SPM
- 期刊名称Journal of Dynamic Systems, Measurement, and Control
- 作者Clayton, Garrett M.; Tien, Szuchi; Leang, Kam K.; Zou, Qingze; Devasia, Santosh
- 卷第131卷
- 期第6期
- 印刷ISSN0022-0434
- 文件大小748.52KB
- 发表时间2009
- DOI10.1115/1.4000158
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