SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, CA (Sunday 2 August 2009)] Advances in X-Ray/EUV Optics and Components IV - Methods to improve the accuracy of the surface reconstruction with a Fizeau interferometer
- 作者Vidal, Josep; Khounsary, Ali M.; Morawe, Christian; Nicolas, Josep; Campos, Juan; Goto, Shunji
- 卷第7448卷
- 印刷ISSN0277-786X
- 文件大小1067.43KB
- 发表时间2009
- DOI10.1117/12.825968
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