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DC Magnetron Sputtering Deposition of Titanium Oxide Nanoparticles: Influence of Temperature, Pressure and Deposition Time on the Deposited Layer Morphology, the Wetting and Optical Surface Properties

DC Magnetron Sputtering Deposition of Titanium Oxide Nanoparticles: Influence of Temperature, Pressure and Deposition Time on the Deposited Layer Morphology, the Wetting and Optical Surface Properties

Laurent Dreesen; Francesca Cecchet; Stéphane Lucas
  • 作者Laurent Dreesen; Francesca Cecchet; Stéphane Lucas
  • 卷第6卷
  • 印刷ISSN1612-8850
  • 电子ISSN1612-8869
  • 文件大小384.58KB
  • 发表时间2009
  • DOI10.1002/ppap.200932201
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