Nanolevel Polishing Using MCF
- 期刊名称Transactions of the Materials Research Society of Japan
- 作者Matsuo, Y.; Yamamoto, K.; Shimada, K.
- 卷第34卷
- 期第1期
- 印刷ISSN1382-3469
- 电子ISSN2188-1650
- 文件大小524.59KB
- 发表时间2009
- DOI10.14723/tmrsj.34.149
- 页码149-152
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