![[AIP FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2009 - Albany (New York) (11–15 May 2009)] AIP Conference Proceedings - A Study Of Gate-All-Around Transistors By Electron Tomography]()
[AIP FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2009 - Albany (New York) (11–15 May 2009)] AIP Conference Proceedings - A Study Of Gate-All-Around Transistors By Electron TomographyCherns, P. D.; Lorut, F.; Beçu, S.; Dupré, C.; Tachi, K.; Cooper, D.; Chabli, A.; Ernst, T.; Secula, Erik M.; Seiler, David G.; Khosla, Rajinder P.; Herr, Dan; Michael Garner, C.; McDonald, Robert; Diebold, Alain C. · 2009