Metrological atomic force microscope using a large range scanning dual stage
- 作者Jong-Ahn Kim; Jae Wan Kim; Chu-Shik Kang; Tae Bong Eom
- 卷第10卷
- 期第5期
- 印刷ISSN2234-7593
- 电子ISSN2005-4602
- 文件大小544.22KB
- 发表时间2009-12
- DOI10.1007/s12541-009-0087-z
- 页码11-17
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