Evaluation of the soft x-ray reflectivity of micropore optics using anisotropic wet etching of silicon wafers
Mitsuishi, Ikuyuki; Ezoe, Yuichiro; Koshiishi, Masaki; Mita, Makoto; Maeda, Yoshitomo; Yamasaki, Noriko Y.; Mitsuda, Kazuhisa; Shirata, Takayuki; Hayashi, Takayuki; Takano, Takayuki
- 期刊名称ao/49/6/ao-49-6-1007.pdf
- 作者Mitsuishi, Ikuyuki; Ezoe, Yuichiro; Koshiishi, Masaki; Mita, Makoto; Maeda, Yoshitomo; Yamasaki, Noriko Y.; Mitsuda, Kazuhisa; Shirata, Takayuki; Hayashi, Takayuki; Takano, Takayuki
- 卷第49卷
- 期第6期
- 印刷ISSN0003-6935
- 电子ISSN1539-4522
- 文件大小499.81KB
- 发表时间2010
- DOI10.1364/AO.49.001007