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The study of helicon plasma source

Miao, Ting-Ting; Zhao, Hong-Wei; Liu, Zhan-Wen; Shang, Yong; Sun, Liang-Ting; Zhang, Xue-Zhen; Zhao, Huan-Yu

期刊名称Review of Scientific Instruments
作者Miao, Ting-Ting; Zhao, Hong-Wei; Liu, Zhan-Wen; Shang, Yong; Sun, Liang-Ting; Zhang, Xue-Zhen; Zhao, Huan-Yu
卷第81卷
期第2期
印刷ISSN0034-6748
文件大小590.47KB
发表时间2010
DOI10.1063/1.3271172