Electrically Benign Dry-Etching Method for Rutile TiO[sub 2] Thin-Film Capacitors with Ru Electrodes
Kim, Kyung Min; Lee, Sang Young; Choi, Gyu Jin; Han, Jeong Hwan; Hwang, Cheol Seong
- 期刊名称Electrochemical and Solid-State Letters
- 作者Kim, Kyung Min; Lee, Sang Young; Choi, Gyu Jin; Han, Jeong Hwan; Hwang, Cheol Seong
- 卷第13卷
- 期第1期
- 印刷ISSN1099-0062
- 文件大小328.32KB
- 发表时间2010
- DOI10.1149/1.3247971