A Si/Glass Bulk-Micromachined Cryogenic Heat Exchanger for High Heat Loads: Fabrication, Test, and Application Results

• 期刊名称Journal of Microelectromechanical Systems
• 作者Zhu, Weibin; White, Michael J.; Nellis, Gregory F.; Klein, Sanford A.; Gianchandani, Yogesh B.
• 卷第19卷
• 期第1期
• 印刷ISSN1057-7157
• 电子ISSN1941-0158
• 文件大小1354.62KB
• 发表时间2010-02
• DOI10.1109/jmems.2009.2034322
• 页码38-47