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[IEEE 2010 IEEE International Conference on Semiconductor Electronics (ICSE) - Malacca, Malaysia (2010.06.28-2010.06.30)] 2010 IEEE International Conference on Semiconductor Electronics (ICSE2010) - Optimum design of SU-8 based accelerometer with reduced cross axis sensitivity

[IEEE 2010 IEEE International Conference on Semiconductor Electronics (ICSE) - Malacca, Malaysia (2010.06.28-2010.06.30)] 2010 IEEE International Conference on Semiconductor Electronics (ICSE2010) - Optimum design of SU-8 based accelerometer with reduced cross axis sensitivity

Ray, Prasenjit; Rao, V. Ramgopal; Apte, Prakash R.

作者Ray, Prasenjit; Rao, V. Ramgopal; Apte, Prakash R.
文件大小892.72KB
发表时间2010
DOI10.1109/smelec.2010.5549364
页码289-292

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