MEMS technology integrated in the CMOS back end

R. Gaddi; R. Van Kampen; A. Unamuno; V. Joshi; D. Lacey; M. Renault; C. Smith; R. Knipe; D. Yost

作者R. Gaddi; R. Van Kampen; A. Unamuno; V. Joshi; D. Lacey; M. Renault; C. Smith; R. Knipe; D. Yost
卷第50卷
印刷ISSN0026-2714
文件大小1031.12KB
发表时间2010
DOI10.1016/j.microrel.2010.07.113
页码1593-1598

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