[IEEE 2010 Winter Simulation Conference - (WSC 2010) - Baltimore, MD, USA (2010.12.5-2010.12.8)] Proceedings of the 2010 Winter Simulation Conference - A multistage mathematical programming based scheduling approach for the photolithography area in semiconductor manufacturing
Klemmt, Andreas; Lange, Jan; Weigert, Gerald; Lehmann, Frank; Seyfert, Jens
- 作者Klemmt, Andreas; Lange, Jan; Weigert, Gerald; Lehmann, Frank; Seyfert, Jens
- 文件大小671.86KB
- 发表时间2010
- DOI10.1109/wsc.2010.5678943
- 页码2474-2485