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Fabrication of ordered nanospheres using a combination of nanoimprint lithography and controlled dewetting

Fabrication of ordered nanospheres using a combination of nanoimprint lithography and controlled dewetting

Schleunitz, Arne; Spreu, Christian; Lee, JaeJong; Schift, Helmut

期刊名称Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
作者Schleunitz, Arne; Spreu, Christian; Lee, JaeJong; Schift, Helmut
卷第28卷
期第6期
印刷ISSN1071-1023
文件大小702.25KB
发表时间2010
DOI10.1116/1.3498762

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