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Inelastic electron tunneling spectroscopy study of ultrathin Al[sub 2]O[sub 3]–TiO[sub 2] dielectric stack on Si

Liu, Zuoguang; Cui, Sharon; Kornblum, Lior; Eizenberg, Moshe; Chang, Ming-Feng; Ma, T. P.

期刊名称Applied Physics Letters
作者Liu, Zuoguang; Cui, Sharon; Kornblum, Lior; Eizenberg, Moshe; Chang, Ming-Feng; Ma, T. P.
卷第97卷
期第20期
印刷ISSN0003-6951
文件大小1072.63KB
发表时间2010
DOI10.1063/1.3518478