Nonlinear enhancement of plasma density in linear combination of multiple collisional internal inductively coupled plasma sources
- 期刊名称Physics of Plasmas
- 作者Chen, Zhipeng; Li, Hong; Li, Bin; Luo, Chen; Xie, Jinlin; Liu, Wandong
- 卷第17卷
- 期第10期
- 印刷ISSN1070-664X
- 文件大小1296.53KB
- 发表时间2010
- DOI10.1063/1.3486200
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