Active low temperature oxidation as a route to minimize electrode–oxide interface reactions in nanoscale capacitors
Podpirka, Adrian; Viswanath, B.; Ramanathan, Shriram
- 期刊名称Journal of Applied Physics
- 作者Podpirka, Adrian; Viswanath, B.; Ramanathan, Shriram
- 卷第108卷
- 期第2期
- 印刷ISSN0021-8979
- 文件大小1591.45KB
- 发表时间2010
- DOI10.1063/1.3456446