Molecular simulation on interfacial structure and gettering efficiency of direct silicon bonded (110)/(100) substrates
- 期刊名称Journal of Applied Physics
- 作者Kariyazaki, Hiroaki; Aoki, Tatsuhiko; Izunome, Koji; Sueoka, Koji
- 卷第107卷
- 期第11期
- 印刷ISSN0021-8979
- 文件大小1063.35KB
- 发表时间2010
- DOI10.1063/1.3407525
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